A pattern mining framework for inter-wafer abnormality analysis

Nik Sumikawa, Li-C. Wang, Magdy S. Abadir. A pattern mining framework for inter-wafer abnormality analysis. In 2013 IEEE International Test Conference, ITC 2013, Anaheim, CA, USA, September 6-13, 2013. pages 1-10, IEEE Computer Society, 2013. [doi]

Abstract

Abstract is missing.