Optimal Scheduling of Combined Wafer Fabrication Equipment Taking Mechanical Arms as Buffers

Junqing Sun, Yilin Wang, Meiling Feng, Bin Sun. Optimal Scheduling of Combined Wafer Fabrication Equipment Taking Mechanical Arms as Buffers. In Wanqing Wu, Lipo Wang, Chunlei Ji, Niansheng Chen, Qiang Sun 0005, Xiaoyong Song, Xin Wang 0034, editors, 6th International Conference on Systems and Informatics, ICSAI 2019, Shanghai, China, November 2-4, 2019. pages 23-27, IEEE, 2019. [doi]

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