Gian Antonio Susto, Alessandro Beghi, Cristina De Luca. A Virtual Metrology system for predicting CVD thickness with equipment variables and qualitative clustering. In Zoubir Mammeri, editor, IEEE 16th Conference on Emerging Technologies & Factory Automation, ETFA 2011, Toulouse, France, September 5-9, 2011. pages 1-4, IEEE, 2011. [doi]
Abstract is missing.