Gian Antonio Susto, Adrian B. Johnston, Paul G. O'Hara, Seán F. McLoone. Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes. In 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013, Madison, WI, USA, August 17-20, 2013. pages 201-206, IEEE, 2013. [doi]
Abstract is missing.