Naohito Suzumura, K. Omori, Hideaki Tsuchiya, Hideki Aono, T. Yamashita. Impact of Anode-side Defect Generation on Inter-Level TDDB Degradation in Cu/Low-k Damascene Structures. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-6, IEEE, 2020. [doi]
Abstract is missing.