Thermal transient characterisation of the etching quality of micro electro mechanical systems

Peter Szabó, Balázs Németh, Márta Rencz. Thermal transient characterisation of the etching quality of micro electro mechanical systems. Microelectronics Journal, 40(7):1042-1047, 2009. [doi]

Authors

Peter Szabó

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Balázs Németh

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Márta Rencz

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