Peter Szabó, Balázs Németh, Márta Rencz. Thermal transient characterisation of the etching quality of micro electro mechanical systems. Microelectronics Journal, 40(7):1042-1047, 2009. [doi]
@article{SzaboNR09,
title = {Thermal transient characterisation of the etching quality of micro electro mechanical systems},
author = {Peter Szabó and Balázs Németh and Márta Rencz},
year = {2009},
doi = {10.1016/j.mejo.2007.07.119},
url = {http://dx.doi.org/10.1016/j.mejo.2007.07.119},
researchr = {https://researchr.org/publication/SzaboNR09},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {40},
number = {7},
pages = {1042-1047},
}