Rikiya Takita, Kazuyoshi Tsuchiya, Yasutomo Uetsuji. Development of sputtering conditions for PZT micro actuator with high piezoelectric property by Au-Pt buffer layer. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 285-290, IEEE, 2011. [doi]
Abstract is missing.