Xinran Tan, Fan Zhu, Chao Wang, Yang Yu, Jian Shi, Xue Qi, Feng Yuan, JiuBin Tan. Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors. Sensors, 17(11):2672, 2017. [doi]
Abstract is missing.