As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

B. J. Tang, Kris Croes, Y. Barbarin, Y. Q. Wang, Robin Degraeve, Y. Li, M. Toledano-Luque, T. Kauerauf, J. Bömmels, Zsolt Tokei, Ingrid De Wolf. As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability. Microelectronics Reliability, 54(9-10):1675-1679, 2014. [doi]

@article{TangCBWDLTKBTW14,
  title = {As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability},
  author = {B. J. Tang and Kris Croes and Y. Barbarin and Y. Q. Wang and Robin Degraeve and Y. Li and M. Toledano-Luque and T. Kauerauf and J. Bömmels and Zsolt Tokei and Ingrid De Wolf},
  year = {2014},
  doi = {10.1016/j.microrel.2014.07.089},
  url = {http://dx.doi.org/10.1016/j.microrel.2014.07.089},
  researchr = {https://researchr.org/publication/TangCBWDLTKBTW14},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {54},
  number = {9-10},
  pages = {1675-1679},
}