As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

B. J. Tang, Kris Croes, Y. Barbarin, Y. Q. Wang, Robin Degraeve, Y. Li, M. Toledano-Luque, T. Kauerauf, J. Bömmels, Zsolt Tokei, Ingrid De Wolf. As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability. Microelectronics Reliability, 54(9-10):1675-1679, 2014. [doi]

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