Meng Tang, A. Cagliani, M. Escouflaire, S. Mouisel, Z. J. Davis. Noise depression of parasitic capacitance for frequency detection of micromechanical bulk disk resonator. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 728-731, IEEE, 2010. [doi]
Abstract is missing.