Fabrication of Less than 20-nm-Diameter Nanodot Arrays Using Inorganic Electron Beam Resist and Post Exposure Bake

Jun Taniguchi, Tetsuro Manabe, Kiyoshi Ishikawa. Fabrication of Less than 20-nm-Diameter Nanodot Arrays Using Inorganic Electron Beam Resist and Post Exposure Bake. IJAT, 5(3):349-352, 2011. [doi]

Abstract

Abstract is missing.