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Design Considerations and Fabrication Challenges of Surface Electrode Ion Trap with TSV Integration

Jing Tao, HongYu Li, Peng Zhao, Yu Dian Lim, Anak Agung Alit Apriyana, Chuan Seng Tan. Design Considerations and Fabrication Challenges of Surface Electrode Ion Trap with TSV Integration. In 2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019. pages 1-5, IEEE, 2019. [doi]

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