Study of the actuation speed, bounces occurrences, and contact reliability of ohmic RF-MEMS switches

Augusto Tazzoli, M. Barbato, F. Mattiuzzo, V. Ritrovato, Gaudenzio Meneghesso. Study of the actuation speed, bounces occurrences, and contact reliability of ohmic RF-MEMS switches. Microelectronics Reliability, 50(9-11):1604-1608, 2010. [doi]

Abstract

Abstract is missing.