Adaptive Control of Electrostatic Microactuators With Bidirectional Drive

Keng-Peng Tee, Shuzhi Sam Ge, Francis Eng Hock Tay. Adaptive Control of Electrostatic Microactuators With Bidirectional Drive. IEEE Trans. Contr. Sys. Techn., 17(2):340-352, 2009. [doi]

Abstract

Abstract is missing.