Rapid thermal plasma deposition of transparent nanocrystalline ZnO thin films and the effects of annealing

Kwok Siong Teh, Joachim Pedersen, Heather Esposito. Rapid thermal plasma deposition of transparent nanocrystalline ZnO thin films and the effects of annealing. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 261-265, IEEE, 2012. [doi]

Abstract

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