Tat Joo Teo, I-Ming Chen, Guilin Yang, Wei Lin. A Novel Actuator for High-Precision Alignment in a Nano-Imprint Multi-Layers-Interconnection Fabrication. In 2007 IEEE International Conference on Robotics and Automation, ICRA 2007, 10-14 April 2007, Roma, Italy. pages 1419-1424, IEEE, 2007. [doi]
Abstract is missing.