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Deep learning for virtual metrology: Modeling with optical emission spectroscopy data

Matteo Terzi, Chiara Masiero, Alessandro Beghi, Marco Maggipinto, Gian Antonio Susto. Deep learning for virtual metrology: Modeling with optical emission spectroscopy data. In IEEE 3rd International Forum on Research and Technologies for Society and Industry, RTSI 2017, Modena, Italy, September 11-13, 2017. pages 1-6, IEEE, 2017. [doi]

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