A Tungsten-Rhenium Thin Film Thermocouples Sensor Based on AlN Transition Layer

Bian Tian, Bingfei Zhang, Zhongkai Zhang, Zhaojun Liu, Jiangjiang Liu, Gong Cheng, Qijing Lin, Chen Wu, Peng Shi, Zhuangde Jiang. A Tungsten-Rhenium Thin Film Thermocouples Sensor Based on AlN Transition Layer. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 826-829, IEEE, 2021. [doi]

Abstract

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