Viktor Tielen, Yves Bellouard. Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching. Micromachines, 5(3):697-710, 2014. [doi]
@article{TielenB14,
title = {Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching},
author = {Viktor Tielen and Yves Bellouard},
year = {2014},
doi = {10.3390/mi5030697},
url = {http://dx.doi.org/10.3390/mi5030697},
researchr = {https://researchr.org/publication/TielenB14},
cites = {0},
citedby = {0},
journal = {Micromachines},
volume = {5},
number = {3},
pages = {697-710},
}