D. Tiernc, Antonio Arreghini, Alicja Lesniewska, Y. Jeong, Marleen H. van der Veen, J. Stiers, N. Bazzazian, Ivan Ciofi, Geert Van den bosch, Maarten Rosmeulen. Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND. In IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024. pages 1-5, IEEE, 2024. [doi]
@inproceedings{TierncALJVSBCBR24,
title = {Exploring the Reliability Limits for the Z-Pitch Scaling of Molybdenum Inter-Word Line Oxides in 3D NAND},
author = {D. Tiernc and Antonio Arreghini and Alicja Lesniewska and Y. Jeong and Marleen H. van der Veen and J. Stiers and N. Bazzazian and Ivan Ciofi and Geert Van den bosch and Maarten Rosmeulen},
year = {2024},
doi = {10.1109/IRPS48228.2024.10529305},
url = {https://doi.org/10.1109/IRPS48228.2024.10529305},
researchr = {https://researchr.org/publication/TierncALJVSBCBR24},
cites = {0},
citedby = {0},
pages = {1-5},
booktitle = {IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024},
publisher = {IEEE},
isbn = {979-8-3503-6976-2},
}