Photonics Heterogeneous Integration (PHI) of Thin-Film Lithium Niobate and Hydrogen-Free Silicon Nitride on a 200-mm Silicon Photonics Platform

Landobasa Y. M. Tobing, B. Li, B. Pan, C. Lau, A. W. K. Fong, Y. Zhang, Y. Cao, J. Zhou, S. N. Foo, W. Q. Tan, C. Lee, J. O. Yoo, F. Masahisa, L. Xie, N. Venkataraman, S. C. Chong, T. Ghosh, M. Zhao, D. Zhu, K. W. Ang, N. Singh, L. W. Lim, X. Luo, Y. C. Yeo. Photonics Heterogeneous Integration (PHI) of Thin-Film Lithium Niobate and Hydrogen-Free Silicon Nitride on a 200-mm Silicon Photonics Platform. In Optical Fiber Communications Conference and Exhibition, OFC 2026, Los Angeles, CA, USA, March 15-19, 2026. pages 1-3, IEEE, 2026. [doi]

Abstract

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