Device and circuit implications of double-patterning - A designer s perspective

Rasit Onur Topaloglu. Device and circuit implications of double-patterning - A designer s perspective. In Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011, Santa Clara, California, USA, 14-16 March 2011. pages 757-760, IEEE, 2011. [doi]

Abstract

Abstract is missing.