Design of an ultra-low pressure sensor based on the growth of graphene on silicon dioxide surface

Quochung Tran, Chengchen Gao, Yilong Hao. Design of an ultra-low pressure sensor based on the growth of graphene on silicon dioxide surface. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 526-529, IEEE, 2017. [doi]

Abstract

Abstract is missing.