Trap-polarization interaction during low-field trap characterization on hafnia-based ferroelectric gatestacks

Brecht Truijen, Barry J. O'Sullivan, Md. Nurul Alam, Dieter Claes, M. Thesberg, Philippe Roussel, Adrian Chasin, Geert Van den bosch, Ben Kaczer, Jan Van Houdt. Trap-polarization interaction during low-field trap characterization on hafnia-based ferroelectric gatestacks. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 12-1, IEEE, 2022. [doi]

Abstract

Abstract is missing.