Sliding Mode Observer Based Multi-Layer Metal Plates Core Temperature On-Line Estimation for Semiconductor Intelligence Manufacturing

Min-Che Tsai, Chao-Chung Peng. Sliding Mode Observer Based Multi-Layer Metal Plates Core Temperature On-Line Estimation for Semiconductor Intelligence Manufacturing. IEEE Access, 8:194561-194574, 2020. [doi]

Authors

Min-Che Tsai

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Chao-Chung Peng

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