Effects of Source and Drain Impurity Profile on Breakdown Voltage of High-Performance Si TFTs

Shinzo Tsuboi, Genshiro Kawachi, Masahiro Mitani, Takashi Okada. Effects of Source and Drain Impurity Profile on Breakdown Voltage of High-Performance Si TFTs. Inf. Media Technol., 3(1):1-6, 2008. [doi]

Abstract

Abstract is missing.