High-Performance Ellipsometry With 2-D Expanded Channels for Spectroscopy and Polarization Analysis

Huatian Tu, Yuxiang Zheng, Yao Shan, Yao Chen, Haotian Zhang, Pian Liu, Haibin Zhao, Rongjun Zhang, Songyou Wang, Jing Li, Hongzhu Yu, YoungPak Lee, Liangyao Chen. High-Performance Ellipsometry With 2-D Expanded Channels for Spectroscopy and Polarization Analysis. IEEE T. Instrumentation and Measurement, 70:1-8, 2021. [doi]

Abstract

Abstract is missing.