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Hiroyuki Uchiyama, Hiroshi Sato, Kazunori Shinoda, Akira Taike, Takafumi Taniguchi, Shinji Tsuji. 1.3-mu m InGaAlAs-BH laser with Cl2/N2 ECR plasma etched mesas. IEICE Electronic Express, 1(7):193-197, 2004. [doi]
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