S. Uejima, Chiemi Oka, Seiichi Hata, Junpei Sakurai. Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2018, Nagoya, Japan, December 9-12, 2018. pages 1-5, IEEE, 2018. [doi]
Abstract is missing.