Polishing Characteristics and Mechanism of Polishing Glass Substrate Using Suede Pad with Fine Micrometer-Sized Pores

Michio Uneda, Nodoka Yamada, Yoshihiro Tawara. Polishing Characteristics and Mechanism of Polishing Glass Substrate Using Suede Pad with Fine Micrometer-Sized Pores. IJAT, 16(1):52-59, 2022. [doi]

Abstract

Abstract is missing.