Direct ArF excimer laser microfabrication methods for polymer photonics

Miltiadis Vasileiadis, Loukas Athanasekos, Dimitris Alexandropoulos, Nikolaos Kehagias, Nikolaos Vainos. Direct ArF excimer laser microfabrication methods for polymer photonics. In 16th International Conference on Transparent Optical Networks, ICTON 2014, Graz, Austria, July 6-10, 2014. pages 1-4, IEEE, 2014. [doi]

Abstract

Abstract is missing.