Tools and Techniques for Failure Analysis and Qualification of MEMS

Jeremy A. Walraven. Tools and Techniques for Failure Analysis and Qualification of MEMS. In Proceedings 2003 International Test Conference (ITC 2003), Breaking Test Interface Bottlenecks, 28 September - 3 October 2003, Charlotte, NC, USA. pages 834-842, IEEE Computer Society, 2003. [doi]

Abstract

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