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Characteristics optimization of N::2::O annealing on tungsten nanocrystal with W/Si dual-sputtered method for nonvolatile memory application

Jer-Chyi Wang, Pai-Chi Chou, Chao Sung Lai, Wen-Hui Lee, Chi-Fong Ai. Characteristics optimization of N::2::O annealing on tungsten nanocrystal with W/Si dual-sputtered method for nonvolatile memory application. Microelectronics Reliability, 50(5):639-642, 2010. [doi]

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