Investigation on LIGA-like process based on multilevel imprint lithography

Quandai Wang, Yugang Duan, Yucheng Ding, Bingheng Lu, Jiawei Xiang, Lianfa Yang. Investigation on LIGA-like process based on multilevel imprint lithography. Microelectronics Journal, 40(1):149-155, 2009. [doi]

Abstract

Abstract is missing.