A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier

Fujun Wang, Zhichen Huo, Cunman Liang, Beichao Shi, Yanling Tian, Xingyu Zhao, Dawei Zhang 0001. A Novel Actuator-Internal Micro/Nano Positioning Stage With an Arch-Shape Bridge-Type Amplifier. IEEE Transactions on Industrial Electronics, 66(12):9161-9172, 2019. [doi]

Abstract

Abstract is missing.