Noncontact Thickness Measurement of Metal Films Using Eddy-Current Sensors Immune to Distance Variation

Hongbo Wang, Wei Li, Zhihua Feng. Noncontact Thickness Measurement of Metal Films Using Eddy-Current Sensors Immune to Distance Variation. IEEE T. Instrumentation and Measurement, 64(9):2557-2564, 2015. [doi]

Abstract

Abstract is missing.