Design and Control of a Normal-Stressed Electromagnetic Actuated Nano-positioning Stage

Xiangyuan Wang, Linlin Li, Wei-wei Huang, Li-Min Zhu. Design and Control of a Normal-Stressed Electromagnetic Actuated Nano-positioning Stage. In Xin-Jun Liu, Zhenguo Nie, Jingjun Yu, Fugui Xie, Rui Song, editors, Intelligent Robotics and Applications - 14th International Conference, ICIRA 2021, Yantai, China, October 22-25, 2021, Proceedings, Part II. Volume 13014 of Lecture Notes in Computer Science, pages 324-334, Springer, 2021. [doi]

Abstract

Abstract is missing.