Zhenjun Wang, Zhenxiang Yi, Yizhou Ye, Ming Qin, Qing-An Huang. Sensitivity Analysis of Micromachined Thermal Wind Sensor Based on Back Surface Sensing Mode. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 640-643, IEEE, 2018. [doi]
Abstract is missing.