Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator

Chun-Ming Wen, Ming-Yang Cheng, Ke-Han Su. Contouring accuracy improvement of a dual-axis micro-positioning stage powered by piezoelectric actuator. In 11th IEEE International Workshop on Advanced Motion Control, AMC 2010, Nagaoka University of Technology, Nagaoka, Niigata, Japan, March 21st - 24th, 2010. pages 82-87, IEEE, 2010. [doi]

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