Physical Layout Design of Directed Self-Assembly Guiding Alphabet for IC Contact Hole/via Patterning

H.-S. Philip Wong, He Yi, Maryann Tung, Kye Okabe. Physical Layout Design of Directed Self-Assembly Guiding Alphabet for IC Contact Hole/via Patterning. In Azadeh Davoodi, Evangeline Young, editors, Proceedings of the 2015 Symposium on International Symposium on Physical Design, ISPD 2015, Monterey, CA, USA, March 29 - April 01, 2015. pages 65-66, ACM, 2015. [doi]

Abstract

Abstract is missing.