Naiqi Wu, Chengbin Chu, Feng Chu, MengChu Zhou. Modeling and Schedulability Analysis of Single-Arm Cluster Tools with Wafer Residency Time Constraints Using Petri Net. In Proceedings of the IEEE International Conference on Networking, Sensing and Control, ICNSC 2008, Hainan, China, 6-8 April 2008. pages 84-89, IEEE, 2008. [doi]
Abstract is missing.