Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting

Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou. Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 43(1):196-207, 2013. [doi]

Abstract

Abstract is missing.