Tracking Control of PZT-Driven Compliant Precision Positioning Micromanipulator

Zhigang Wu, Min Chen, Ping He 0004, Heng Li 0001, Qi Zhang, Xing-Zhong Xiong, Haoyang Mi, Zuxin Li, Yangmin Li 0001. Tracking Control of PZT-Driven Compliant Precision Positioning Micromanipulator. IEEE Access, 8:126477-126487, 2020. [doi]

Abstract

Abstract is missing.