Developing a selection scheme for dual virtual-metrology outputs

Wei-Ming Wu, Fan-Tien Cheng, Deng-Lin Zeng, Tung-Ho Lin, Jyun-Fang Chen. Developing a selection scheme for dual virtual-metrology outputs. In 2008 IEEE International Conference on Automation Science and Engineering, IEEE CASE 2008, Washington, DC, USA, August 23-26, 2008. pages 230-235, IEEE, 2008. [doi]

Abstract

Abstract is missing.