Triple patterning lithography-aware detailed routing ensuring via layer decomposability

Hua-Yi Wu, Shao-Yun Fang. Triple patterning lithography-aware detailed routing ensuring via layer decomposability. In 2018 International Symposium on VLSI Design, Automation and Test (VLSI-DAT), Hsinchu, Taiwan, April 16-19, 2018. pages 1-4, IEEE, 2018. [doi]

Abstract

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