Fabrication of compact collateral silicon nanowires based on continuously alternating deposition

D. Wu, H. Y. Mao, W. G. Wu. Fabrication of compact collateral silicon nanowires based on continuously alternating deposition. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 601-604, IEEE, 2009. [doi]

Abstract

Abstract is missing.