Compatibility of Queueing Theory, Manufacturing Systems and SEMI Standards

Kan Wu, Leon F. McGinnis, Bert Zwart. Compatibility of Queueing Theory, Manufacturing Systems and SEMI Standards. In IEEE Conference on Automation Science and Engineering, CASE 2007, September 22-25, 2007. Scottsdale, Arizona, USA. pages 501-506, IEEE, 2007. [doi]

Abstract

Abstract is missing.