A 47μW 204MHz AlN Contour-Mode MEMS based tunable oscillator in 65nm CMOS

Xiaotie Wu, Chengjie Zuo, Milin Zhang, Jan Van der Spiegel, Gianluca Piazza. A 47μW 204MHz AlN Contour-Mode MEMS based tunable oscillator in 65nm CMOS. In 2013 IEEE International Symposium on Circuits and Systems (ISCAS2013), Beijing, China, May 19-23, 2013. pages 1757-1760, IEEE, 2013. [doi]

Abstract

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